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Search for "hybrid nanolithography" in Full Text gives 1 result(s) in Beilstein Journal of Nanotechnology.
Expanding the molecular-ruler process through vapor deposition of hexadecanethiol
Beilstein J. Nanotechnol. 2017, 8, 2339–2344, doi:10.3762/bjnano.8.233
- , metal-ligated multilayers, both with and without an alkanethiol capping layer, were utilized to create nanogaps between Au features using the molecular-ruler process. Keywords: hybrid nanolithography; metal-ligated multilayer; molecular ruler; self-assembled monolayers; vapor-phase deposition
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